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Laser Sizing System Vacuum Chuck

IP.com Disclosure Number: IPCOM000051096D
Original Publication Date: 1982-Aug-01
Included in the Prior Art Database: 2005-Feb-10

Publishing Venue

IBM

Related People

Authors:
Chiaiese, VC Dankelman, SG Ehrenberg, SG Tompkins, RE [+details]

Abstract

A CO(2) circulating gas laser, rated at 1.2 kW, and continuously discharging infrared laser radiation at a wavelength of 10.6 Mum, is used to cut multilayer "unfired" ceramic substrates. The laser beam has a diameter of 0.0254 cm (0.010 in.) and is stationary. The laminate, mounted on a vacuum chuck assembly, is indexed under the laser beam. The required substrate tolerances can be designed for X, Y dimensions and for feature to edge centrality.