Alpha Particle Shielding Processes
Original Publication Date: 1981-Jan-01
Included in the Prior Art Database: 2005-Feb-10
Some high density integrated circuit dynamic memory devices are subject to intermittent, or soft, errors due to the existence of alpha particle sources in their environment. An earlier article [*] describes a method of placing a metal and polymeric shield between the alpha-particle-sensitive areas of a dynamic memory chip and sources of alpha particles. This article describes two additional processes having a similar objective. In the first, a metal-polymer composite shield is used, and in the second, a single layer thick polymer shield is used.