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Deflection Free Mask Support

IP.com Disclosure Number: IPCOM000051380D
Original Publication Date: 1981-Jan-01
Included in the Prior Art Database: 2005-Feb-10

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Related People

Rottmann, HR McHugh, JF [+details]


A deflection-free plate holder for mounting resist-coated chrome masks during resist exposure includes three suction cups, having inner and outer ring surfaces, for supporting and holding the mask in place without distortion and a vacuum outlet located at the side of the support. The area of contact (as presented by the outer ring surfaces) is sufficiently large to provide enough friction for satisfactory clamping even under degraded vacuum conditions.