Alpha Probe for Memory Chip Testing
Original Publication Date: 1981-Jan-01
Included in the Prior Art Database: 2005-Feb-10
Arrangements are described for in-wafer testing of functional memory chips for sensitivity to alpha particle bombardment in high density arrays. A pin-shaped radioactive alpha particle source, confined by a pair of collimators, is used to expose identified locations on the chip. Identification of the exposed site is achieved by a laser illuminating the chip at the interception of collimator axis and wafer surface, and a microscope arrangement employed to identify the location of the illuminated spot.