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Browse Prior Art Database

Deep UV Resists

IP.com Disclosure Number: IPCOM000051566D
Original Publication Date: 1981-Feb-01
Included in the Prior Art Database: 2005-Feb-10

Publishing Venue

IBM

Related People

Authors:
Fredericks, EC Moreau, WM [+details]

Abstract

Acrylate polymers, which have increased sensitivity in the deep UV (below 300 nanometers) range, contain an aromatic molecule within three carbon atoms of the carbonyl group.