The InnovationQ application will be updated on Sunday, May 31st from 10am-noon ET. You may experience brief service interruptions during that time.
Browse Prior Art Database

Deep UV Resists

IP.com Disclosure Number: IPCOM000051566D
Original Publication Date: 1981-Feb-01
Included in the Prior Art Database: 2005-Feb-10

Publishing Venue


Related People

Fredericks, EC Moreau, WM [+details]


Acrylate polymers, which have increased sensitivity in the deep UV (below 300 nanometers) range, contain an aromatic molecule within three carbon atoms of the carbonyl group.