Blind Electrical Probing in a Scanning Electron Microscope
Original Publication Date: 1981-Feb-01
Included in the Prior Art Database: 2005-Feb-10
To perform electron beam induced current (EBIC) and voltage contrast (VC) measurements in a scanning electron microscope (SEM), electrical contact to the device is required. Using the disclosed technique contact can be made on the device with control outside the chamber, resulting in versatility, precision, time savings.