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N, N Diethylaminotrimethyl Silane as an Adhesion Promoter for Photoresists

IP.com Disclosure Number: IPCOM000051750D
Original Publication Date: 1981-Mar-01
Included in the Prior Art Database: 2005-Feb-10

Publishing Venue

IBM

Related People

Authors:
Barry, JA Johnson, Jr., C Wilbarg, RR [+details]

Abstract

A silane adhesion promoter provides superior photoresist adhesion without the dewetting of the photoresist from the substrate.