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Silicon Coated Anode Plate for Sputtering

IP.com Disclosure Number: IPCOM000051751D
Original Publication Date: 1981-Mar-01
Included in the Prior Art Database: 2005-Feb-10

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Related People

Joseph, RR Wong, MC [+details]


An anode plate of quartz is coated with a layer of silicon to provide more uniform contact and a more uniform sputtered quartz layer deposition.