Dismiss
The InnovationQ application will be updated on Sunday, May 31st from 10am-noon ET. You may experience brief service interruptions during that time.
Browse Prior Art Database

Silicon Coated Anode Plate for Sputtering

IP.com Disclosure Number: IPCOM000051751D
Original Publication Date: 1981-Mar-01
Included in the Prior Art Database: 2005-Feb-10

Publishing Venue

IBM

Related People

Authors:
Joseph, RR Wong, MC [+details]

Abstract

An anode plate of quartz is coated with a layer of silicon to provide more uniform contact and a more uniform sputtered quartz layer deposition.