Wafer Carrier Registration Pads
Original Publication Date: 1981-Mar-01
Included in the Prior Art Database: 2005-Feb-10
Conventional wafer carriers provide a sloped wall slot geometry (typically 10 degrees) to avoid abrasion to wafer devices during mechanical transfer operations. This condition aggravates automatic wafer handling because the wafers would rock due to two-point contact and provide a horizontal misregistration. This condition impacts the reliability of some auto wafer handling equipment, causing wafer breakage and/or contamination.