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Phenylsilanes are useful adhesion promoters for dielectric resin layers which must be cured at high temperatures.
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High Temperature Coupling Agents as Adhesion Promoters
Phenylsilanes are useful adhesion promoters for dielectric resin layers which
must be cured at high temperatures.
A layer of phenylsilane is deposited on a silicon dioxide surface followed by a
layer of a high temperature dielectric resin. The resin is cured at 350 degrees C.
The cured resin can not be peeled or removed using pressure-sensitive tape. In
contrast, a layer of cured resin, without the phenylsilane, is easily removed from
the silicon dioxide layer by light rubbing. The phenylsilane is stable to about a
150 degrees C higher temperature than aliphatic silanes. The phenyl group in
phenylsilane is attached directly to silicon. Silanes with substituted phenyl
groups (e.g., cyano) can also be used.