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Thin Film Evaporator Gage

IP.com Disclosure Number: IPCOM000051784D
Original Publication Date: 1981-Mar-01
Included in the Prior Art Database: 2005-Feb-10

Publishing Venue

IBM

Related People

Authors:
Braen, RC Lorenzen, JA [+details]

Abstract

In gas panel fabrication, two glass plates are individually fabricated prior to completing the panel. Conductor arrays are formed on each of the glass plates, and coated with a dielectric layer which, in turn, is overcoated with a coating of refractory secondary emissive material, such as magnesium oxide. Both the conductor metallurgy, chrome-copper-chrome, and the magnesium oxide are applied by vapor deposition. In practice, the plates are mounted in a rotating cage during deposition with the glass plates parallel to the axis of cage rotation. During metallurgy deposition, this configuration results in large angles of deposition causing poor adhesion between the plate and metal layers, resulting in the formation of blisters in the areas of high angle deposition.