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Technique to Isolate Charge Electrodes

IP.com Disclosure Number: IPCOM000051832D
Original Publication Date: 1981-Mar-01
Included in the Prior Art Database: 2005-Feb-11

Publishing Venue

IBM

Related People

Authors:
Patel, HN Walker, GG [+details]

Abstract

We have developed a technique to isolate charge electrodes which consists of masking laminated charge plates with sputter or vacuum-deposited copper, and then slotting, sputtering, plating and testing, followed by copper etching using appropriate copper etchant. The etchant dissolves copper and at the same time removes undesirable rhodium from tines and surfaces of the substrate. That results in complete isolation of electrodes.