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Flexible Multi Motion Planetary System for Vacuum Deposition Disclosure Number: IPCOM000051833D
Original Publication Date: 1981-Mar-01
Included in the Prior Art Database: 2005-Feb-11

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Albert, PA Cockerill, J Grandia, J [+details]


In sputtering deposition from a three-source sputter gun system, it is important to provide a substrate motion that yields thickness uniformity of deposit under simultaneous action of one, two or three sources.