Browse Prior Art Database

Flexible Multi Motion Planetary System for Vacuum Deposition

IP.com Disclosure Number: IPCOM000051833D
Original Publication Date: 1981-Mar-01
Included in the Prior Art Database: 2005-Feb-11

Publishing Venue

IBM

Related People

Authors:
Albert, PA Cockerill, J Grandia, J [+details]

Abstract

In sputtering deposition from a three-source sputter gun system, it is important to provide a substrate motion that yields thickness uniformity of deposit under simultaneous action of one, two or three sources.