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Fixture for Precision Etching of Crystalline Materials

IP.com Disclosure Number: IPCOM000051875D
Original Publication Date: 1981-Mar-01
Included in the Prior Art Database: 2005-Feb-11

Publishing Venue

IBM

Related People

Authors:
Kightlinger, DA Seitz, HK [+details]

Abstract

Precision etching of a silicon crystal can be accomplished by providing an etching fixture with a concentric tube etchant supply, etch product removal and neutralizer source. The structure is shown in Fig. 1.