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Browse Prior Art Database

Self Aligned Contact

IP.com Disclosure Number: IPCOM000051971D
Original Publication Date: 1981-Apr-01
Included in the Prior Art Database: 2005-Feb-11

Publishing Venue

IBM

Related People

Authors:
Dockerty, RC Scheuerlein, R [+details]

Abstract

This is a technique for forming a self-aligned contact to a diffused region through a composite oxide layer.