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Crucible Pedestal to Prevent Heater Arcing

IP.com Disclosure Number: IPCOM000052158D
Original Publication Date: 1981-May-01
Included in the Prior Art Database: 2005-Feb-11

Publishing Venue

IBM

Related People

Authors:
Murgai, A [+details]

Abstract

An electrically insulating crucible pedestal is provided to prevent arcing. The arcing causes uncontrolled variations in melt temperature during large diameter Czochralski silicon crystal growth.