Purifying Aluminum of Alpha Particle Producing Contamination
Original Publication Date: 1981-May-01
Included in the Prior Art Database: 2005-Feb-11
Aluminum has been found to have alpha-particle-producing contamination which will cause "soft errors" in integrated circuitry. The heating of aluminum to a melt and rapid cooling of the melt to a solid segregates heavy metals, such as radium, that may be a source of alpha particles, to the surface of the aluminum. The surface is now abrasively removed to free the aluminum of this contaminant. This aluminum, which is relatively free of alpha-particle-producing contaminants, should be used for evaporation onto integrated circuitry.