High Speed, High Density Bipolar Technology
Original Publication Date: 1981-May-01
Included in the Prior Art Database: 2005-Feb-11
The following steps describe a method for fabricating high-speed, high-performance bipolar circuit components. In particular, a method is described for fabricating high-performance bipolar NPN transistors, Schottky diodes with P guard rings, and resistors with approximately 400 ohms/ sheet resistance.