Sensitive Thin Film Monitor
Original Publication Date: 1981-May-01
Included in the Prior Art Database: 2005-Feb-11
Thin film monitors (TFMs) are being used as vehicle to monitor chrome source spitting in CrAlCu metallurgy systems. Chrome spitting is a major source of first to second metal interlevel shorts. The problem that exists is that present TFMs are very insensitive monitors and only detect source spitting where the residue is greater in height than the dielectric (see figure). This technique suggests a process change to increase the sensitivity for any size chrome residue as well as reducing process time and cost.