Browse Prior Art Database

Interferometric Grating Projection System

IP.com Disclosure Number: IPCOM000052196D
Original Publication Date: 1981-May-01
Included in the Prior Art Database: 2005-Feb-11

Publishing Venue

IBM

Related People

Authors:
Frosch, A Jaerisch, W Makosch, G [+details]

Abstract

Grating-like intensity patterns with large dimensions are required in many optical fields, such as metrology. Such patterns can be generated by bringing to interference two parallel beams including a small angle between their directions of propagation.