Automatic Measurement of the Position and Inclination of Bores or Mask Windows
Original Publication Date: 1981-May-01
Included in the Prior Art Database: 2005-Feb-11
During the manufacture of windows in screening masks in MLC (multilayer ceramic) processes, a thin plate is photolithographically treated and etched from both sides. Etching from both sides may lead to a displacement and thus to an inclination of the window. The apparatus and method described below permit the position and inclination of the window to be automatically determined.