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Automatic Measurement of the Position and Inclination of Bores or Mask Windows

IP.com Disclosure Number: IPCOM000052198D
Original Publication Date: 1981-May-01
Included in the Prior Art Database: 2005-Feb-11

Publishing Venue

IBM

Related People

Authors:
Pfeffer, E Wagner, D [+details]

Abstract

During the manufacture of windows in screening masks in MLC (multilayer ceramic) processes, a thin plate is photolithographically treated and etched from both sides. Etching from both sides may lead to a displacement and thus to an inclination of the window. The apparatus and method described below permit the position and inclination of the window to be automatically determined.