Dismiss
The InnovationQ application will be updated on Sunday, May 31st from 10am-noon ET. You may experience brief service interruptions during that time.
Browse Prior Art Database

High Resolution Optical Surface Microtopography

IP.com Disclosure Number: IPCOM000052199D
Original Publication Date: 1981-May-01
Included in the Prior Art Database: 2005-Feb-11

Publishing Venue

IBM

Related People

Authors:
Wagner, D [+details]

Abstract

The topography of a sample, such as a photolithographic mask, can be determined by a scanning laser beam in an autofocus arrangement, maintaining the laser focus on the sample by appropriate mechanical lens displacement. However, the probing of structures, such as mask openings, in the submicron range at a high depth-to-width ratio is difficult, as the focus Airy disk has dimensions comparable to those of objectives with great numerical apertures. Apart from this, the mechanical movement of the objective is cumbersome.