Low Energy Polishing of Thin Film Disk
Original Publication Date: 1981-May-01
Included in the Prior Art Database: 2005-Feb-11
Low energy polishing consists of using alumina polishing tape to polish a slowly rotating thin film disk surface, lubricated with kerosene. The slow rotation allows the surface to be in intimate contact with the abrasive particles which drive the loosely held nodules into the film as they are sheared off.