Browse Prior Art Database

Mask Cleaning Procedure

IP.com Disclosure Number: IPCOM000052311D
Original Publication Date: 1981-Jun-01
Included in the Prior Art Database: 2005-Feb-11

Publishing Venue

IBM

Related People

Authors:
Hecht, LC [+details]

Abstract

A commercial material identified as DUREPOLY* is useful for cleaning glass masks used to manufacture semiconductors.