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Transparent Film Thickness Measurement

IP.com Disclosure Number: IPCOM000052339D
Original Publication Date: 1981-Jun-01
Included in the Prior Art Database: 2005-Feb-11

Publishing Venue

IBM

Related People

Authors:
Case, WR Johnson, WE [+details]

Abstract

This measurement technique provides a nondestructive method of measurin transparent film thickness on a reflective substrate [1].