Detection Technique for Observing Semiconductor Devices
Original Publication Date: 1981-Jun-01
Included in the Prior Art Database: 2005-Feb-11
A detector is provided for observing semiconductor devices with a scanning electron microscope (SEM) using the electron-beam-induced current (EBIC) mode. A special sample stage is not needed because one side of the sample need not be electrically isolated and the signal line is also used to apply bias voltage.