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Detection Technique for Observing Semiconductor Devices

IP.com Disclosure Number: IPCOM000052346D
Original Publication Date: 1981-Jun-01
Included in the Prior Art Database: 2005-Feb-11

Publishing Venue

IBM

Related People

Authors:
Murty, K Schneider, CP Scilla, SJ [+details]

Abstract

A detector is provided for observing semiconductor devices with a scanning electron microscope (SEM) using the electron-beam-induced current (EBIC) mode. A special sample stage is not needed because one side of the sample need not be electrically isolated and the signal line is also used to apply bias voltage.