Browse Prior Art Database

Deposition of Thin Films

IP.com Disclosure Number: IPCOM000052418D
Original Publication Date: 1981-Jun-01
Included in the Prior Art Database: 2005-Feb-11

Publishing Venue

IBM

Related People

Authors:
Lopez, JL [+details]

Abstract

A method for depositing thin films on a substrate employs a magnetic field that is applied adjacent to a rotating platform 3 on which the substrate is positioned.