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A method for depositing thin films on a substrate employs a magnetic field that is applied adjacent to a rotating platform 3 on which the substrate is positioned.
English (United States)
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Deposition of Thin Films
A method for depositing thin films on a substrate employs a magnetic field
that is applied adjacent to a rotating platform 3 on which the substrate is
The magnetic field consists of two pairs of fixed Helmholtz coils that are
disposed perpendicularly relative to each other. A current of magnitude A sin
Omega t is applied to the first pair of coils 1, and a current of magnitude A cos
Omega t is applied to the second pair of coils 2, where A = current amplitude,
Omega = angular velocity, and t = time. The resultant magnetic field rotates at
the angular velocity or frequency Omega and has a constant magnitude
proportional to A. The substrate platform 3 also rotates at the frequency Omega
so that the magnetic field vector will be effectively fixed in position relative to the
platform. In this way, the magnetic material that is being deposited as a thin film
is oriented in a desired direction.
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