Metal Oxide Metal Devices with Contact Area Less Than 10/-11/cm/2/ for Josephson and Room Temperature Applications
Original Publication Date: 1981-Jun-01
Included in the Prior Art Database: 2005-Feb-11
This article relates generally to metal oxide metal (MOM) devices which operate at liquid helium and room temperatures. More specifically it relates to such devices which have contact areas less than 10/-11/cm/2/ Two new device configurations and fabrication procedures which will enable the reduction of the effective area of tunneling in metal oxide metal devices (MOMs) to less than 10/-11/cm/2/ are disclosed.