Browse Prior Art Database

SEM Magnification Standard

IP.com Disclosure Number: IPCOM000052469D
Original Publication Date: 1981-Jun-01
Included in the Prior Art Database: 2005-Feb-11

Publishing Venue

IBM

Related People

Authors:
Aliotta, CF Theis, TN [+details]

Abstract

A grating or corrugated structure may be used as a calibration standard for SEM (Scanning Electron Microscope) magnification.