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Sample Preparation Prior to Wet Processing

IP.com Disclosure Number: IPCOM000052509D
Original Publication Date: 1981-Jun-01
Included in the Prior Art Database: 2005-Feb-11

Publishing Venue

IBM

Related People

Authors:
Sands, SA [+details]

Abstract

Described is a method for the reduction and/or elimination of product defects caused by outgassing of process materials from porous surface structures, such as found on alumina ceramic substrates.