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This interlock mechanism prevents chucks, holding semiconductor devices from doubling-up on a projection printer, e.g., the Perkin-Elmer Model 100 projection printer.
English (United States)
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Projection Printer Chuck Interlock
This interlock mechanism prevents chucks, holding semiconductor devices
from doubling-up on a projection printer, e.g., the Perkin-Elmer Model 100
In operation, the projection printer has experienced problems with chucks
holding semiconductor devices doubling-up on the adapter ring. This is caused
by a tool malfunction, such as a noise pulse or a poor mechanical alignment of
the transfer arms. The sequence of events leading to the doubling-up of chucks
is as follows: (1) The inboard arm 10 reaches the adapter ring 12 to remove the
chuck 14 previously positioned, but doesn't pick the chuck off the ring due to a
mechanical failure or misalignment. (2) Both inboard arm 10 and outboard arm
16 retract, with the inboard arm 10 without the chuck and the outboard arm 16
with a chuck 18. (3) The arms 10 and 16 rotate to place chuck 18 in adapter ring 12. (4) Arms 10 and 16 extend wherein arm 16 forces chuck 18 into the
backside of chuck 14 previously left in adapter ring 12. The arm 10 is now
exposed to the operator without the chuck 14 supported thereon. In this position
there is the possibility of damage to the mechanism as well as the great
probability of breaking the semiconductor wafer mounted on chuck 18 when it is
forced against the rear side of chuck 14.
This interlock prevents the foregoing series of events from happening by
stopping the mechanism when the arm 10 fails to interact and remove chuck 14