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Test Structures for Measuring Electrically the Physical Misalignment of a Subcollector/Isolation Junction

IP.com Disclosure Number: IPCOM000052516D
Original Publication Date: 1981-Jun-01
Included in the Prior Art Database: 2005-Feb-11

Publishing Venue

IBM

Related People

Authors:
Nyborg, CA [+details]

Abstract

Kerf test structures of the type shown in Fig. 1 allow a quick and nondestructive misalignment characterization of the subcollector/isolation (SC/ISO) spacing by electrical measurements of the capacitance (CCS) associated with the subcollector.