Test Structures for Measuring Electrically the Physical Misalignment of a Subcollector/Isolation Junction
Original Publication Date: 1981-Jun-01
Included in the Prior Art Database: 2005-Feb-11
Kerf test structures of the type shown in Fig. 1 allow a quick and nondestructive misalignment characterization of the subcollector/isolation (SC/ISO) spacing by electrical measurements of the capacitance (CCS) associated with the subcollector.