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Line Width Measurement Technique

IP.com Disclosure Number: IPCOM000052559D
Original Publication Date: 1981-Jun-01
Included in the Prior Art Database: 2005-Feb-11

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Hairabedian, BZ Hubert, CR [+details]


In gas panel fabrication, parallel conductor arrays are formed on glass plates, covered with a dielectric layer, sealed about their edges, and filled with an ionizable gas of the appropriate composition and pressure. One of the critical parameters in gas panel fabrication is the line width, since variations in line width produce corresponding variations in operating voltages and reduce the operating margin of the device. Average line-width variation on a gas panel plate is accomplished by measuring attenuation of a calibrated source of light transmitted through the plate with a photodetector, since the glass plates on which the conductor arrays are formed act as a neutral density filter wherein the amount of light passing through the plate is directly proportional to the line width.