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Process for the Reduction of Halopolysilanes Disclosure Number: IPCOM000052642D
Original Publication Date: 1981-Jun-01
Included in the Prior Art Database: 2005-Feb-11

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Green, DC [+details]


Disilane and other polysilane hydrides have recently been found useful in the preparation of amorphous silicon. Compared to silane, the polysilanes give higher deposition rates and improved electrical properties.