E Gun Source Thermal Stabilizer
Original Publication Date: 1981-Jun-01
Included in the Prior Art Database: 2005-Feb-11
In evaporating copper by means of an electron (E)-gun source, it is desirable to use a molybdenum crucible to hold the copper pellets in order to produce high quality defect-free copper film. However, the molybdenum material is a very good heat conductor, conducting a great deal of heat from the source to the water-cooled hearth, thus requiring a large power supply to maintain an acceptable evaporation rate of copper.