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E Gun Source Thermal Stabilizer

IP.com Disclosure Number: IPCOM000052692D
Original Publication Date: 1981-Jun-01
Included in the Prior Art Database: 2005-Feb-11

Publishing Venue

IBM

Related People

Authors:
Slattery, WJ [+details]

Abstract

In evaporating copper by means of an electron (E)-gun source, it is desirable to use a molybdenum crucible to hold the copper pellets in order to produce high quality defect-free copper film. However, the molybdenum material is a very good heat conductor, conducting a great deal of heat from the source to the water-cooled hearth, thus requiring a large power supply to maintain an acceptable evaporation rate of copper.