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Electrostatic Tube Cleaner

IP.com Disclosure Number: IPCOM000052693D
Original Publication Date: 1981-Jun-01
Included in the Prior Art Database: 2005-Feb-11

Publishing Venue

IBM

Related People

Authors:
Lajza, JJ Pulaski, DP [+details]

Abstract

Small airborne particles within a tube, generally made of quartz, are removed by periodically passing through the tube, as indicated in Fig. 1, wafers having a high field gradient.