Current Induced Physical Properties of Conducting Thin Films
Original Publication Date: 1981-Jul-01
Included in the Prior Art Database: 2005-Feb-11
In multilayered microcircuitry, the edge profile geometry of one layer determines the edge coverage of succeeding layers. For sharp or undercut edges continuity of succeeding conducting film layers is broken, leading to opens in the circuit, whereas the continuity of succeeding photolithographic layers is broken leading to shorts between layers. Ideally, one wants rounded edges for multilayered microcircuitry.