Browse Prior Art Database

Controlled Microleaving Process

IP.com Disclosure Number: IPCOM000052805D
Original Publication Date: 1981-Jul-01
Included in the Prior Art Database: 2005-Feb-11

Publishing Venue

IBM

Related People

Authors:
Blech, IA Chen, SH Cuomo, JJ Guarnieri, CR Hammond, RH [+details]

Abstract

A method for producing microscopic cleavage in a periodic array by deposition of a highly stressed film onto a sample, thereby producing controlled cleavage in crystalline materials is described.