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Controlled Microleaving Process Disclosure Number: IPCOM000052805D
Original Publication Date: 1981-Jul-01
Included in the Prior Art Database: 2005-Feb-11

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Blech, IA Chen, SH Cuomo, JJ Guarnieri, CR Hammond, RH [+details]


A method for producing microscopic cleavage in a periodic array by deposition of a highly stressed film onto a sample, thereby producing controlled cleavage in crystalline materials is described.