The InnovationQ application will be updated on Sunday, May 31st from 10am-noon ET. You may experience brief service interruptions during that time.
Browse Prior Art Database

Single Crystal Lithographic Structures

IP.com Disclosure Number: IPCOM000052809D
Original Publication Date: 1981-Jul-01
Included in the Prior Art Database: 2005-Feb-11

Publishing Venue


Related People

Broers, AN Cuomo, JJ Krakow, W Yu, DS [+details]


A method is provided for preparing high quality single-crystal lithographic microstructures without cracks or defects and near atomic dimensions.