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Single Crystal Lithographic Structures

IP.com Disclosure Number: IPCOM000052809D
Original Publication Date: 1981-Jul-01
Included in the Prior Art Database: 2005-Feb-11

Publishing Venue

IBM

Related People

Authors:
Broers, AN Cuomo, JJ Krakow, W Yu, DS [+details]

Abstract

A method is provided for preparing high quality single-crystal lithographic microstructures without cracks or defects and near atomic dimensions.