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Control of the Temperature Coefficient of Resistance of High Value Implanted Resistors

IP.com Disclosure Number: IPCOM000052903D
Original Publication Date: 1981-Jul-01
Included in the Prior Art Database: 2005-Feb-12

Publishing Venue

IBM

Related People

Authors:
Keenan, WA Montillo, FJ Seirmarco, JA [+details]

Abstract

High value resistors, when fabricated by diffusion, take up considerable space in integrated circuits. For LSI circuits, high value resistors can be fabricated by the conventional method, modified only in that ion implantation is used.