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Low Particulate Generating Planetary Tooling Disclosure Number: IPCOM000052904D
Original Publication Date: 1981-Jul-01
Included in the Prior Art Database: 2005-Feb-12

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Lennon, CG Lupul, FT Martin, HJ [+details]


The elimination and reduction of particulate generation from planetary tooling (Fig. 1), a principal source of particulate contamination in semiconductor manufacturing, is a desirable requirement. The expansion of technology has brought increased requirements for cleanliness. Increased knowledge and new methods of achieving these requirements are needed to maintain and increase product yield.