Browse Prior Art Database

Palladium Oxide Etching Process

IP.com Disclosure Number: IPCOM000052905D
Original Publication Date: 1981-Jul-01
Included in the Prior Art Database: 2005-Feb-12

Publishing Venue

IBM

Related People

Authors:
Gartner, HM Rich, D Sorbello, F [+details]

Abstract

Palladium oxide (PdO) may inadvertently be formed on palladium surfaces such that free palladium cannot be etched by conventional techniques.