Electroless Plated Spacer Technology
Original Publication Date: 1981-Jul-01
Included in the Prior Art Database: 2005-Feb-12
N- regions 10 are produced by diffusion or ion implantation in a silicon substrate 12 using a polysilicon layer l4 with silicon dioxide layer 15 thereon for self-alignment, as shown in Fig. 1. A technique to produce spacers on the sides of the polysilicon land 14 is to electrolessly plate a material such as nickel or comparable materials thereon. It is possible to plate these materials only on the polysilicon sidewalls and not on the remaining non-polysilicon surfaces. After the formation of spacers 16 by this technique, a second N+ diffusion or ion implantation can be used to form source/drain regions 18, as shown in Fig. 2.