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Semiconductor Wafer Decelerator

IP.com Disclosure Number: IPCOM000053063D
Original Publication Date: 1981-Aug-01
Included in the Prior Art Database: 2005-Feb-12

Publishing Venue

IBM

Related People

Authors:
Beliveau, M [+details]

Abstract

This article describes a retarding mechanism for decelerating sliding, fragile semiconductor wafers, which reduces or eliminates wafer breakage and chipping.