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Palladium-Sintering Process

IP.com Disclosure Number: IPCOM000053096D
Original Publication Date: 1981-Aug-01
Included in the Prior Art Database: 2005-Feb-12

Publishing Venue

IBM

Related People

Authors:
Garner, HM Kapner, H Nanda, MM Prizzia, TC [+details]

Abstract

The essential palladium-sintering furnace operating features include high forming gas flow rate capability of 8 to 10 liters/minute for a 100-millimeter wafer furnace tube, the coupling of the transport carrier to the front end of the furnace tube throughout the sintering cycle, and the maintenance of an all forming gas environment throughout the sintering cycle.