Modified Schottky Barrier Diode Voltage
Original Publication Date: 1981-Aug-01
Included in the Prior Art Database: 2005-Feb-12
Aluminum-copper alloy films for metallization to provide ohmic contacts and Schottky barrier diodes (SBDs) have usually been deposited by evaporating a metal source by the use of radio frequency (RF) energy. The use of electron beam guns (E-guns) to evaporate the metal provides certain advantages. It has been determined, however, that the forward voltage of SBDs produced by evaporation of an aluminum-copper source through the use of E-guns is higher than that produced by evaporation using RF energy. The desired forward voltage (V(f)) of SBDs produced by RF evaporation is in the range of from about 550-600 mv at 1 ma. The actual V(f) of SBDs produced by the use of an E-gun is in the range of from about 650-690 mv at 1 ma.