Browse Prior Art Database

Process for the Fabrication of Deep Ultraviolet Variable Transmission Masks

IP.com Disclosure Number: IPCOM000053098D
Original Publication Date: 1981-Aug-01
Included in the Prior Art Database: 2005-Feb-12

Publishing Venue

IBM

Related People

Authors:
Fredericks, EC Merritt, DP Moreau, WM Wood, RL [+details]

Abstract

This process describes the use of variable depth ion beam exposure to produce a mask pattern with selective transmission through quartz without a metal coating.