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Process for the Fabrication of Deep Ultraviolet Variable Transmission Masks Disclosure Number: IPCOM000053098D
Original Publication Date: 1981-Aug-01
Included in the Prior Art Database: 2005-Feb-12

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Fredericks, EC Merritt, DP Moreau, WM Wood, RL [+details]


This process describes the use of variable depth ion beam exposure to produce a mask pattern with selective transmission through quartz without a metal coating.