Browse Prior Art Database

Wafer-Loading Tool

IP.com Disclosure Number: IPCOM000053107D
Original Publication Date: 1981-Aug-01
Included in the Prior Art Database: 2005-Feb-12

Publishing Venue

IBM

Related People

Authors:
Rosenfeld, LH Ryan, JG [+details]

Abstract

The loading tool 10 shown in Fig. 1 and Fig. 2 allows the semiconductor wafers 12 to be picked up by the edges. Fig. 1 shows the front view of the tool 10 with hook 14 for storage adjustment holes 15 for wafer size, adjustable support 116to prevent wafer 12 from touching the tool, and supports 18 for edge contact. Fig. 2 hows the side view of Fig. 1 wherein two wafers 12 are being loaded back to back by tool 10. Fig. 3 illustrates a fragmentary section of Fig. 1 showing the detail of support 18.