Browse Prior Art Database

Using Titanium Nitride and Silicon Nitride for VLSI Contacts

IP.com Disclosure Number: IPCOM000053200D
Original Publication Date: 1981-Sep-01
Included in the Prior Art Database: 2005-Feb-12

Publishing Venue

IBM

Related People

Authors:
Ting, CY [+details]

Abstract

This article describes the use of titanium nitride (TiN) and silicon nitride (Si(3)N(4)) for very large-scale integration (VLSI) circuit contacts.