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Lift Off Pattern Generation in Sputtered Films

IP.com Disclosure Number: IPCOM000053244D
Original Publication Date: 1981-Sep-01
Included in the Prior Art Database: 2005-Feb-12

Publishing Venue

IBM

Related People

Authors:
Burkhart, RW Silkensen, RD Steving, G Weaver, LR [+details]

Abstract

This article relates generally to pattern generation and sputtered dielectric films and more particularly to a method of pattern generation where thick dielectric films can be provided.